Application of phase-shifted, laser feedback interferometry to the measurement of fluid physics phenomena

Ben Ovryn, Jim Andrews

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have combined the principles of phase-shifting interferometry (PSI) and laser-feedback interferometry (LFI) to produce a new instrument that can measure both optical path length (OPL) changes and discern sample reflectivity variations. In LFI, coherent feedback of the incident light either reflected directly from a surface or reflected after transmission through a region of interest will modulate the output intensity of the laser. By combining PSI and LFI, we have produced a robust instrument, based upon a HeNe laser, with high dynamic range that can be used to measure either static (dc) or oscillatory changes along the optical path. As with other forms of interferometry, large changes in OPL require phase unwrapping. Conversely, small phase changes are limited by the fraction of a fringe that can be measured. We introduce the phase shifts with an electro-optic modulator (EOM) and use either the Carre or Hariharan algorithms to determine the phase and visibility. We have determined the accuracy and precision of our technique by measuring both the bending of a cantilevered piezoelectric bimorph and linear ramps to the EOM. Using PSI, subnanometer displacements can be measured. We have combined our interferometer with a commercial microscope and scanning piezoelectric stage and have measured the variation in OPL and visibility for drops of PDMS (silicone oil) on coated single crystal silicon. Our measurement of the contact angle agrees with the value stated in the literature.

Original languageEnglish (US)
Title of host publicationAmerican Society of Mechanical Engineers, Fluids Engineering Division (Publication) FED
Editors Anon
PublisherASME
Volume12
StatePublished - 1997
Externally publishedYes
EventProceedings of the 1997 ASME Fluids Engineering Division Summer Meeting, FEDSM'97. Part 16 (of 24) - Vancouver, Can
Duration: Jun 22 1997Jun 26 1997

Other

OtherProceedings of the 1997 ASME Fluids Engineering Division Summer Meeting, FEDSM'97. Part 16 (of 24)
CityVancouver, Can
Period6/22/976/26/97

Fingerprint

Interferometry
Physics
Feedback
Fluids
Lasers
Electrooptical effects
Visibility
Modulators
Phase shift
Silicones
Interferometers
Contact angle
Microscopes
Single crystals
Scanning
Silicon

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Ovryn, B., & Andrews, J. (1997). Application of phase-shifted, laser feedback interferometry to the measurement of fluid physics phenomena. In Anon (Ed.), American Society of Mechanical Engineers, Fluids Engineering Division (Publication) FED (Vol. 12). ASME.

Application of phase-shifted, laser feedback interferometry to the measurement of fluid physics phenomena. / Ovryn, Ben; Andrews, Jim.

American Society of Mechanical Engineers, Fluids Engineering Division (Publication) FED. ed. / Anon. Vol. 12 ASME, 1997.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ovryn, B & Andrews, J 1997, Application of phase-shifted, laser feedback interferometry to the measurement of fluid physics phenomena. in Anon (ed.), American Society of Mechanical Engineers, Fluids Engineering Division (Publication) FED. vol. 12, ASME, Proceedings of the 1997 ASME Fluids Engineering Division Summer Meeting, FEDSM'97. Part 16 (of 24), Vancouver, Can, 6/22/97.
Ovryn B, Andrews J. Application of phase-shifted, laser feedback interferometry to the measurement of fluid physics phenomena. In Anon, editor, American Society of Mechanical Engineers, Fluids Engineering Division (Publication) FED. Vol. 12. ASME. 1997
Ovryn, Ben ; Andrews, Jim. / Application of phase-shifted, laser feedback interferometry to the measurement of fluid physics phenomena. American Society of Mechanical Engineers, Fluids Engineering Division (Publication) FED. editor / Anon. Vol. 12 ASME, 1997.
@inproceedings{ab2cb32dd34741c1b4df3de12805f377,
title = "Application of phase-shifted, laser feedback interferometry to the measurement of fluid physics phenomena",
abstract = "We have combined the principles of phase-shifting interferometry (PSI) and laser-feedback interferometry (LFI) to produce a new instrument that can measure both optical path length (OPL) changes and discern sample reflectivity variations. In LFI, coherent feedback of the incident light either reflected directly from a surface or reflected after transmission through a region of interest will modulate the output intensity of the laser. By combining PSI and LFI, we have produced a robust instrument, based upon a HeNe laser, with high dynamic range that can be used to measure either static (dc) or oscillatory changes along the optical path. As with other forms of interferometry, large changes in OPL require phase unwrapping. Conversely, small phase changes are limited by the fraction of a fringe that can be measured. We introduce the phase shifts with an electro-optic modulator (EOM) and use either the Carre or Hariharan algorithms to determine the phase and visibility. We have determined the accuracy and precision of our technique by measuring both the bending of a cantilevered piezoelectric bimorph and linear ramps to the EOM. Using PSI, subnanometer displacements can be measured. We have combined our interferometer with a commercial microscope and scanning piezoelectric stage and have measured the variation in OPL and visibility for drops of PDMS (silicone oil) on coated single crystal silicon. Our measurement of the contact angle agrees with the value stated in the literature.",
author = "Ben Ovryn and Jim Andrews",
year = "1997",
language = "English (US)",
volume = "12",
editor = "Anon",
booktitle = "American Society of Mechanical Engineers, Fluids Engineering Division (Publication) FED",
publisher = "ASME",

}

TY - GEN

T1 - Application of phase-shifted, laser feedback interferometry to the measurement of fluid physics phenomena

AU - Ovryn, Ben

AU - Andrews, Jim

PY - 1997

Y1 - 1997

N2 - We have combined the principles of phase-shifting interferometry (PSI) and laser-feedback interferometry (LFI) to produce a new instrument that can measure both optical path length (OPL) changes and discern sample reflectivity variations. In LFI, coherent feedback of the incident light either reflected directly from a surface or reflected after transmission through a region of interest will modulate the output intensity of the laser. By combining PSI and LFI, we have produced a robust instrument, based upon a HeNe laser, with high dynamic range that can be used to measure either static (dc) or oscillatory changes along the optical path. As with other forms of interferometry, large changes in OPL require phase unwrapping. Conversely, small phase changes are limited by the fraction of a fringe that can be measured. We introduce the phase shifts with an electro-optic modulator (EOM) and use either the Carre or Hariharan algorithms to determine the phase and visibility. We have determined the accuracy and precision of our technique by measuring both the bending of a cantilevered piezoelectric bimorph and linear ramps to the EOM. Using PSI, subnanometer displacements can be measured. We have combined our interferometer with a commercial microscope and scanning piezoelectric stage and have measured the variation in OPL and visibility for drops of PDMS (silicone oil) on coated single crystal silicon. Our measurement of the contact angle agrees with the value stated in the literature.

AB - We have combined the principles of phase-shifting interferometry (PSI) and laser-feedback interferometry (LFI) to produce a new instrument that can measure both optical path length (OPL) changes and discern sample reflectivity variations. In LFI, coherent feedback of the incident light either reflected directly from a surface or reflected after transmission through a region of interest will modulate the output intensity of the laser. By combining PSI and LFI, we have produced a robust instrument, based upon a HeNe laser, with high dynamic range that can be used to measure either static (dc) or oscillatory changes along the optical path. As with other forms of interferometry, large changes in OPL require phase unwrapping. Conversely, small phase changes are limited by the fraction of a fringe that can be measured. We introduce the phase shifts with an electro-optic modulator (EOM) and use either the Carre or Hariharan algorithms to determine the phase and visibility. We have determined the accuracy and precision of our technique by measuring both the bending of a cantilevered piezoelectric bimorph and linear ramps to the EOM. Using PSI, subnanometer displacements can be measured. We have combined our interferometer with a commercial microscope and scanning piezoelectric stage and have measured the variation in OPL and visibility for drops of PDMS (silicone oil) on coated single crystal silicon. Our measurement of the contact angle agrees with the value stated in the literature.

UR - http://www.scopus.com/inward/record.url?scp=0030650796&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030650796&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0030650796

VL - 12

BT - American Society of Mechanical Engineers, Fluids Engineering Division (Publication) FED

A2 - Anon, null

PB - ASME

ER -