Surface profilometry of a thick liquid lens on a solid surface using a high numerical aperture phase shifting laser feedback interferometer

David G. Fischer, Ben Ovryn

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We have developed a model that predicts the effective optical path length (OPL) through a thick, refractive specimen on a reflective substrate as measured with a high numerical aperture, confocal interference microscope. Assuming an infinitestinal pinhole, only one 'magic ray' contributes to the measured OPL. It is possible to correct for the refractive errors and to unambiguously interpret the data. We present a comparison of our model predictions with experimental measurements of a fluid drop on a silicon substrate, obtained with a phase shifting laser feedback microscope.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages378-387
Number of pages10
Volume3782
StatePublished - 1999
Externally publishedYes
EventProceedings of the 1999 'Optical Manufacturing and Testing III' - Denver, CO, USA
Duration: Jul 20 1999Jul 23 1999

Other

OtherProceedings of the 1999 'Optical Manufacturing and Testing III'
CityDenver, CO, USA
Period7/20/997/23/99

Fingerprint

Profilometry
numerical aperture
optical paths
solid surfaces
Interferometers
Lenses
Microscopes
interferometers
microscopes
lenses
Feedback
Lasers
Liquids
pinholes
Substrates
liquids
lasers
rays
interference
Silicon

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Fischer, D. G., & Ovryn, B. (1999). Surface profilometry of a thick liquid lens on a solid surface using a high numerical aperture phase shifting laser feedback interferometer. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3782, pp. 378-387). Society of Photo-Optical Instrumentation Engineers.

Surface profilometry of a thick liquid lens on a solid surface using a high numerical aperture phase shifting laser feedback interferometer. / Fischer, David G.; Ovryn, Ben.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3782 Society of Photo-Optical Instrumentation Engineers, 1999. p. 378-387.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fischer, DG & Ovryn, B 1999, Surface profilometry of a thick liquid lens on a solid surface using a high numerical aperture phase shifting laser feedback interferometer. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3782, Society of Photo-Optical Instrumentation Engineers, pp. 378-387, Proceedings of the 1999 'Optical Manufacturing and Testing III', Denver, CO, USA, 7/20/99.
Fischer DG, Ovryn B. Surface profilometry of a thick liquid lens on a solid surface using a high numerical aperture phase shifting laser feedback interferometer. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3782. Society of Photo-Optical Instrumentation Engineers. 1999. p. 378-387
Fischer, David G. ; Ovryn, Ben. / Surface profilometry of a thick liquid lens on a solid surface using a high numerical aperture phase shifting laser feedback interferometer. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3782 Society of Photo-Optical Instrumentation Engineers, 1999. pp. 378-387
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