Surface profilometry of a thick liquid lens on a solid surface using a high numerical aperture phase shifting laser feedback interferometer

David G. Fischer; Ben Ovryn

Surface profilometry of a thick liquid lens on a solid surface using a high numerical aperture phase shifting laser feedback interferometer

David G. Fischer, Ben Ovryn

Anatomy & Structural Biology

Research output: Contribution to journal › Conference article › peer-review

Abstract

We have developed a model that predicts the effective optical path length (OPL) through a thick, refractive specimen on a reflective substrate as measured with a high numerical aperture, confocal interference microscope. Assuming an infinitestinal pinhole, only one 'magic ray' contributes to the measured OPL. It is possible to correct for the refractive errors and to unambiguously interpret the data. We present a comparison of our model predictions with experimental measurements of a fluid drop on a silicon substrate, obtained with a phase shifting laser feedback microscope.

Original language	English (US)
Pages (from-to)	378-387
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3782
State	Published - Dec 1 1999
Event	Proceedings of the 1999 'Optical Manufacturing and Testing III' - Denver, CO, USA Duration: Jul 20 1999 → Jul 23 1999

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Cite this

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title = "Surface profilometry of a thick liquid lens on a solid surface using a high numerical aperture phase shifting laser feedback interferometer",

abstract = "We have developed a model that predicts the effective optical path length (OPL) through a thick, refractive specimen on a reflective substrate as measured with a high numerical aperture, confocal interference microscope. Assuming an infinitestinal pinhole, only one 'magic ray' contributes to the measured OPL. It is possible to correct for the refractive errors and to unambiguously interpret the data. We present a comparison of our model predictions with experimental measurements of a fluid drop on a silicon substrate, obtained with a phase shifting laser feedback microscope.",

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year = "1999",

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language = "English (US)",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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T1 - Surface profilometry of a thick liquid lens on a solid surface using a high numerical aperture phase shifting laser feedback interferometer

AU - Fischer, David G.

AU - Ovryn, Ben

PY - 1999/12/1

Y1 - 1999/12/1

N2 - We have developed a model that predicts the effective optical path length (OPL) through a thick, refractive specimen on a reflective substrate as measured with a high numerical aperture, confocal interference microscope. Assuming an infinitestinal pinhole, only one 'magic ray' contributes to the measured OPL. It is possible to correct for the refractive errors and to unambiguously interpret the data. We present a comparison of our model predictions with experimental measurements of a fluid drop on a silicon substrate, obtained with a phase shifting laser feedback microscope.

AB - We have developed a model that predicts the effective optical path length (OPL) through a thick, refractive specimen on a reflective substrate as measured with a high numerical aperture, confocal interference microscope. Assuming an infinitestinal pinhole, only one 'magic ray' contributes to the measured OPL. It is possible to correct for the refractive errors and to unambiguously interpret the data. We present a comparison of our model predictions with experimental measurements of a fluid drop on a silicon substrate, obtained with a phase shifting laser feedback microscope.

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M3 - Conference article

AN - SCOPUS:0033326634

SN - 0277-786X

VL - 3782

SP - 378

EP - 387

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Proceedings of the 1999 'Optical Manufacturing and Testing III'

Y2 - 20 July 1999 through 23 July 1999

ER -

Surface profilometry of a thick liquid lens on a solid surface using a high numerical aperture phase shifting laser feedback interferometer

Abstract

ASJC Scopus subject areas

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