Surface profilometry of a thick liquid lens on a solid surface using a high numerical aperture phase shifting laser feedback interferometer

David G. Fischer, Ben Ovryn

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

We have developed a model that predicts the effective optical path length (OPL) through a thick, refractive specimen on a reflective substrate as measured with a high numerical aperture, confocal interference microscope. Assuming an infinitestinal pinhole, only one 'magic ray' contributes to the measured OPL. It is possible to correct for the refractive errors and to unambiguously interpret the data. We present a comparison of our model predictions with experimental measurements of a fluid drop on a silicon substrate, obtained with a phase shifting laser feedback microscope.

Original languageEnglish (US)
Pages (from-to)378-387
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3782
StatePublished - Dec 1 1999
EventProceedings of the 1999 'Optical Manufacturing and Testing III' - Denver, CO, USA
Duration: Jul 20 1999Jul 23 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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