Solid-phase epitaxy of implanted silicon by cw Ar ion laser irradiation

J. S. Williams, W. L. Brown, H. J. Leamy, J. M. Poate, J. W. Rodgers, D. Rousseau, G. A. Rozgonyi, J. A. Shelnutt, T. T. Sheng

Research output: Contribution to journal › Article › peer-review