Phase-shifted laser feedback interferometry

Ben Ovryn, James H. Andrews

Research output: Contribution to journalArticle

42 Scopus citations

Abstract

We have introduced the techniques of phase-shifting interferometry into a laser feedback interference microscope based on a helium-neon laser. With moderate feedback, multiple reflections between the sample and the laser are shown to be negligible, and the interferometer responds sinusoidally with a well-characterized fringe modulation. One can obtain higher signal-to-noise ratios by determining the number of additional terms required for modeling the effect of multiple reflections on the phase and visibility measurements in the high-feedback regime. Changes in optical path length are determined with nanometer precision without phase averaging or lock-in detection.

Original languageEnglish (US)
Pages (from-to)1078-1080
Number of pages3
JournalOptics Letters
Volume23
Issue number14
DOIs
StatePublished - Jul 15 1998

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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