Phase-measuring laser feedback interferometry: applications to microscopy

Ben Ovryn, James H. Andrews, Steven J. Eppell

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

This brief proceedings paper presents an introduction to our adaptation of the principles of phase shifting interferometry to a laser feedback interferometer. The application of these methods allows a direct measurement of both the optical path length and the fringe modulation. Examination of the spatial variation of both of these quantities over an object's surface provides a quantitative map of the geometry of a sample's surface. We demonstrate that discrete phase shifting methods can be used to accurately measure optical path length changes and fringe modulation.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsCarol J. Cogswell, Gordon S. Kino, Tony Wilson
Pages153-162
Number of pages10
StatePublished - Jan 1 1996
EventThree-Dimensional Microscopy: Image Acquisition and Processing III - San Jose, CA, USA
Duration: Jan 30 1996Feb 1 1996

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2655
ISSN (Print)0277-786X

Other

OtherThree-Dimensional Microscopy: Image Acquisition and Processing III
CitySan Jose, CA, USA
Period1/30/962/1/96

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Ovryn, B., Andrews, J. H., & Eppell, S. J. (1996). Phase-measuring laser feedback interferometry: applications to microscopy. In C. J. Cogswell, G. S. Kino, & T. Wilson (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (pp. 153-162). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2655).