Phase-measuring laser feedback interferometry: applications to microscopy

Ben Ovryn, James H. Andrews, Steven J. Eppell

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This brief proceedings paper presents an introduction to our adaptation of the principles of phase shifting interferometry to a laser feedback interferometer. The application of these methods allows a direct measurement of both the optical path length and the fringe modulation. Examination of the spatial variation of both of these quantities over an object's surface provides a quantitative map of the geometry of a sample's surface. We demonstrate that discrete phase shifting methods can be used to accurately measure optical path length changes and fringe modulation.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsCarol J. Cogswell, Gordon S. Kino, Tony Wilson
Pages153-162
Number of pages10
Volume2655
StatePublished - 1996
Externally publishedYes
EventThree-Dimensional Microscopy: Image Acquisition and Processing III - San Jose, CA, USA
Duration: Jan 30 1996Feb 1 1996

Other

OtherThree-Dimensional Microscopy: Image Acquisition and Processing III
CitySan Jose, CA, USA
Period1/30/962/1/96

Fingerprint

optical paths
Interferometry
Microscopic examination
interferometry
Modulation
microscopy
Feedback
modulation
Lasers
Interferometers
lasers
congressional reports
interferometers
examination
Geometry
geometry

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Ovryn, B., Andrews, J. H., & Eppell, S. J. (1996). Phase-measuring laser feedback interferometry: applications to microscopy. In C. J. Cogswell, G. S. Kino, & T. Wilson (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 2655, pp. 153-162)

Phase-measuring laser feedback interferometry : applications to microscopy. / Ovryn, Ben; Andrews, James H.; Eppell, Steven J.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / Carol J. Cogswell; Gordon S. Kino; Tony Wilson. Vol. 2655 1996. p. 153-162.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ovryn, B, Andrews, JH & Eppell, SJ 1996, Phase-measuring laser feedback interferometry: applications to microscopy. in CJ Cogswell, GS Kino & T Wilson (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 2655, pp. 153-162, Three-Dimensional Microscopy: Image Acquisition and Processing III, San Jose, CA, USA, 1/30/96.
Ovryn B, Andrews JH, Eppell SJ. Phase-measuring laser feedback interferometry: applications to microscopy. In Cogswell CJ, Kino GS, Wilson T, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2655. 1996. p. 153-162
Ovryn, Ben ; Andrews, James H. ; Eppell, Steven J. / Phase-measuring laser feedback interferometry : applications to microscopy. Proceedings of SPIE - The International Society for Optical Engineering. editor / Carol J. Cogswell ; Gordon S. Kino ; Tony Wilson. Vol. 2655 1996. pp. 153-162
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