Measurement of changes in optical path length and reflectivity with phase-shifting laser feedback interferometry

Ben Ovryn, James H. Andrews

Research output: Contribution to journalArticle

25 Citations (Scopus)

Abstract

The operating characteristics of a novel phase-shifting interferometer are presented. Interference arises by reflecting the light from a sample back into the cavity of a cw He-Ne laser. Changes in phase and fringe visibility are calculated from an overdetermined set of phase-shifted intensity measurements with the phase shifts being introduced with an electro-optic modulator. The interferometer is sensitive enough to measure displacements below 1 Hz with a rms error of approximately 1 nm from a sample that reflects only 3% of the 28 μW that is incident on its surface. The interferometer is applied to the determination of cantilever bending of a piezoelectric bimorph.

Original languageEnglish (US)
Pages (from-to)1959-1967
Number of pages9
JournalApplied Optics
Volume38
Issue number10
StatePublished - Apr 1 1999
Externally publishedYes

Fingerprint

optical paths
Interferometry
Interferometers
interferometry
interferometers
reflectance
Feedback
Lasers
lasers
Electrooptical effects
visibility
Phase shift
Visibility
Modulators
electro-optics
modulators
phase shift
interference
cavities

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Measurement of changes in optical path length and reflectivity with phase-shifting laser feedback interferometry. / Ovryn, Ben; Andrews, James H.

In: Applied Optics, Vol. 38, No. 10, 01.04.1999, p. 1959-1967.

Research output: Contribution to journalArticle

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